Damage induced by exposing AlGaAs layers to electron cyclotron resonance SF[sub 6]/CHF[sub 3]

Mitani, Katsuhiko; Oda, Hiroto
August 1994
Applied Physics Letters;8/29/1994, Vol. 65 Issue 9, p1165
Academic Journal
Examines the damage induced by exposing Al[sub x]Ga[sub 1-x]As and GaAs crystals to electron cyclotron resonance. Measurement of the sheet resistance of the samples; Restoration of the damage by annealing; Effect of annealing on plasma-exposed Al[sub x]Ga[sub 1-x]As; Composition of the GaAs samples.


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