Synthesis of dislocation free Si[sub y](Sn[sub x]C[sub 1-x])[sub 1-y] alloys by molecular beam

Gang He; Savellano, Mark D.
August 1994
Applied Physics Letters;8/29/1994, Vol. 65 Issue 9, p1159
Academic Journal
Synthesizes strain-compensated single-crystal SiSnC alloy films on silicon (100) substrates. Composition of silicon alloy films; Deposition of amorphous SiSnC alloys by molecular beam deposition; Observation of the crystallization; Compositional and structural analysis of the SISnC alloy thin films.


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