TITLE

Surface cleaning effect on dielectric integrity for ultrathin oxynitrides grown in N[sub 2]O

AUTHOR(S)
Ming-yin Hao; Kafai Lai
PUB. DATE
August 1994
SOURCE
Applied Physics Letters;8/29/1994, Vol. 65 Issue 9, p1133
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Develops a wafer-cleaning procedure for ultrathin dielectric growth. Modification of RCA clean, dilute-HF dip and immersion in methanol/HF solution; Growth of ultrathin oxynitride films; Effect of surface preparation on dielectric integrity; Examination of the devices fabricated by the cleaning procedure.
ACCESSION #
4218175

 

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