Submicrometer resonant tunnelling diodes fabricated by photolithography and selective wet etching

Wang, J.; Beton, P.H.
August 1994
Applied Physics Letters;8/29/1994, Vol. 65 Issue 9, p1124
Academic Journal
Details the fabrication of small area resonant tunnelling diodes using a process based on photolithography and selective wet etching. Exhibition of additional peaks by low-temperature current-voltage characteristics of diodes; Observation of pronounced asymmetry in current-voltage; Degree of lateral quantum confinement.


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