140-GHz metal-semiconductor-metal photodetectors on silicon-on-insulator substrate with a scaled

Liu, M.Y.; Chen, E.
August 1994
Applied Physics Letters;8/15/1994, Vol. 65 Issue 7, p887
Academic Journal
Investigates the fabrication of metal-semiconductor-metal photodetectors on a silicon-on-insulator substrate. Magnitude of the photodetector bandwidth; Application of electro-optic sampling; Relationship between the detector speed and the light penetration wavelength; Creation of Schottky contact and low detector dark current.


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