Study of density in pulsed-laser deposited amorphous carbon films using x-ray reflectivity

Huai, Y.; Chaker, M.
August 1994
Applied Physics Letters;8/15/1994, Vol. 65 Issue 7, p830
Academic Journal
Determines the absolute density of pulsed-laser deposited amorphous carbon (a-C) ultrathin films using X-ray reflectivity. Evolution of the film density with the substrate temperature; Variety of a-C film density values; Implication of the density and optical band gap values for a diamond-like to graphite-like change.


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