TITLE

Low temperature synthesis and properties of lithium niobate thin films

AUTHOR(S)
Joshi, V.; Roy, D.
PUB. DATE
September 1993
SOURCE
Applied Physics Letters;9/6/1993, Vol. 63 Issue 10, p1331
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the deposition of lithium niobate thin films on silicon by a sol-gel technique. Properties of lithium niobate films; Characterization of annealed films using x-ray diffraction and transmission electron microscopy; Results of electrical characterization of the films in metal-ferroelectric semiconductor configuration.
ACCESSION #
4218008

 

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