TITLE

Spectroscopic ellipsometry of epitaxial Si {100} surfaces

AUTHOR(S)
Nayar, V.; Leong, W.Y.
PUB. DATE
September 1992
SOURCE
Applied Physics Letters;9/14/1992, Vol. 61 Issue 11, p1304
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines epitaxial silicon orientations by ex situ spectroscopic ellipsometry. Analysis of the peak values of the real and imaginary parts of the dielectric function; Impact of the surface features with lateral scales on the dielectric spectra; Implication of the high dielectric function peaks for nanometer lateral-scale roughness.
ACCESSION #
4217943

 

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