Optical spectroscopic study of the growth dynamics of radio-frequency-sputtered

Lucia, M.L.; Hernandez-Rojas, J.L.
July 1992
Applied Physics Letters;7/13/1992, Vol. 61 Issue 2, p231
Academic Journal
Presents an optical spectroscopic study of the growth dynamics of radio-frequency-sputtered YBa[sub 2]Cu[sub 3]O[sub 7-x] thin films. Analysis of the properties of the deposition process; Discovery of strong emission of all the species above the target value; Dominance of atomic oxygen in the film oxidation.


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