Charge trapping centers in N-rich silicon nitride thin films

Warren, W.L.; Kanicki, J.
July 1992
Applied Physics Letters;7/13/1992, Vol. 61 Issue 2, p216
Academic Journal
Investigates charge trapping centers in nitrogen-rich silicon nitride thin films. Examination of the effects of multiple electron and hole injections; Rise of the initial spin density in the nitride; Support of the study to the negative-U premises.


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