TITLE

Digital etching of GaAs using Se molecular beam and atomic hydrogen beam

AUTHOR(S)
Takatani, Shinichiro; Kikawa, Takeshi
PUB. DATE
November 1994
SOURCE
Applied Physics Letters;11/14/1994, Vol. 65 Issue 20, p2585
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Develops a digital etching technique for gallium arsenide using selenium (Se) molecular beam and atomic hydrogen beam. Induction of selenium and arsenic exchange reaction through Se molecular beam irradiation; Selective removal of gallium[sub 2]selenium[sub 3] by atomic hydrogen beam; Involvement of a self-limiting mechanism in the etching process.
ACCESSION #
4207711

 

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