Pulsed laser deposition and characterization of epitaxial Cu/TiN/Si(100) heterostructures

Vispute, R.D.; Chowdhury, R.
November 1994
Applied Physics Letters;11/14/1994, Vol. 65 Issue 20, p2565
Academic Journal
Describes the growth of epitaxial copper/titanium nitride/silicon(100) heterostructures by pulsed laser deposition technique. Structural characterization using three-axis x-ray diffraction and transmission electron microscopy; Mechanism of growth in large lattice mismatch system; Implication for advanced microelectronic devices fabrication.


Related Articles

  • Top-interface-controlled fatigue of epitaxial Pb(Zr[sub 0.52]Ti[sub 0.48])O[sub 3] ferroelectric thin films on La[sub 0.7]Sr[sub 0.3]MnO[sub 3] electrodes. Wu, Wenbin; Wenbin Wu; Wong, K. H.; Wong, K.H.; Choy, C. L.; Choy, C.L.; Zhang, Y. H.; Zhang, Y.H. // Applied Physics Letters;11/20/2000, Vol. 77 Issue 21 

    Epitaxial Pb(Zr[sub 0.52]Ti[sub 0.48])O[sub 3]/La[sub 0.7]Sr[sub 0.3]MnO[sub 3](PZT/LSMO) and LSMO/PZT/LSMO heterostructures have been grown on LaAlO[sub 3](001) substrates by pulsed-laser deposition. Three types of ferroelectric capacitors, i.e., Pt/PZT/LSMO (A), LSMO/PZT/LSMO (B), and...

  • Epitaxial growth of Pb(Zr0.53Ti0.47)O3 films on Pt coated magnetostrictive amorphous metallic substrates toward next generation multiferroic heterostructures. Hu, B.; Chen, Y.; Yang, A.; Gillette, S.; Fitchorov, T.; Geiler, A.; Daigle, A.; Su, X. D.; Wang, Z.; Viehland, D.; Harris, V. G // Journal of Applied Physics;Mar2012, Vol. 111 Issue 6, p064104 

    Piezoelectric films of Pb(Zr0.53Ti0.47)O3 (PZT) were deposited by pulsed laser deposition onto metallic magnetostrictive substrates. In order to optimize the growth of PZT films, a buffer layer of Pt was employed, as well as variation of deposition temperature, pressure, and laser energy. Room...

  • Low temperature synthesis and electrical properties of epitaxial Sr[sub 0.8]Bi[sub 2.2]Ta[sub 2]O[sub 9] thin films. Chattopadhyay, Soma; Kvit, A.; Kumar, D.; Sharma, A. K.; Sankar, J.; Narayan, J.; Knight, V. S.; Coleman, T. S.; Lee, C. B. // Applied Physics Letters;5/28/2001, Vol. 78 Issue 22, p3514 

    High quality epitaxial thin films of Sr[sub 0.8]Bi[sub 2.2]Ta[sub 2]O[sub 9] (SBT) were grown on LaNiO[sub 3] (LNO) bottom electrodes. The SBT/LNO heterostructure was fabricated on (001) oriented LaAlO[sub 3] substrates by pulsed laser ablation. X-ray diffraction and high resolution transmission...

  • Growth, characterization, and electrical properties of PbZr[sub0.52]Ti[sub 0.48]O[sub3] thin films on buffered silicon substrates using pulsed laser deposition. Gilmore III, Walter M.; Chattopadhyay, Soma; Kvit, Alex; Sharma, A. K.; Lee, C. B.; Collis, Ward J.; Sankar, J.; Narayan, J. // Journal of Materials Research;Jan2003, Vol. 18 Issue 1, p111 

    Presents a study which synthesized the epitaxial thin films of PbZr[sub0.52]Ti[sub0.48]O[sub3] (PZT) on SrRuO[sub3]/SrTiO[sub3]/MgO/TiN/Si heterostructures by pulsed laser deposition. Growth parameters for each of the films; Crystallinity and phase purity of the films; Functionality of each...

  • Exchange bias effects in epitaxial Fe3O4/BiFeO3 heterostructures. Qu, T. L.; Zhao, Y. G.; Yu, P.; Zhao, H. C.; Zhang, S.; Yang, L. F. // Applied Physics Letters;6/11/2012, Vol. 100 Issue 24, p242410 

    High quality Fe3O4 (5-20 nm)/BiFeO3 (BFO) heterostructures have been grown by pulsed laser deposition on (001) SrTiO3 (STO) substrates. Large exchange bias (EB) effects have been observed below 200 K in Fe3O4/BFO/STO structures compared with Fe3O4/STO structures. The exchange bias field...

  • Epitaxial growth and capacitance-voltage characteristics of BiFeO3/CeO2/yttria-stabilized zirconia/Si(001) heterostructure. Hu, Zhongqiang; Li, Meiya; Zhu, Yongdan; Pu, Shizhou; Liu, Xiaolian; Sebo, Bobby; Zhao, Xingzhong; Dong, Shuxiang // Applied Physics Letters;6/18/2012, Vol. 100 Issue 25, p252908 

    We report the epitaxial growth of multiferroic BiFeO3 (BFO) film on Si(001) substrate by pulsed laser deposition using CeO2/yttria-stabilized zirconia (YSZ) as buffer layers. The epitaxial relationships of the films were BFO(001)/CeO2(001)/YSZ(001)/Si(001) for out-of-plane and...

  • Magnetotransport and Hall effect studies of SrRuO3/SrTiO3 superlattices. Bern, F.; Ziese, M. // EPJ Web of Conferences;2013, Issue 40, p15013-p.1 

    Good epitaxial growth characteristics make oxide heterostructures of the perovskite family a model system for the study of emerging phenomena at interfaces. Here we report on SrRuO3/SrTiO3 superlattices as well as single films with individual layer thicknesses between two and 20 unit cells...

  • Pulsed laser deposition of epitaxial Si/TiN/Si(100) heterostructures. Chowdhury, R.; Chen, X.; Narayan, J. // Applied Physics Letters;3/7/1994, Vol. 64 Issue 10, p1236 

    Demonstrates the pulse laser deposition of epitaxial silicon (Si)/titanium nitride (TiN)/Si(100) heterostructures. Application of the silicon-on-conductor device configuration in three-dimensional integrated circuits; Use of X-ray diffraction, Rutherford backscattering and transmission electron...

  • Oxidation kinetics in SrTiO[sub 3] homoepitaxy on SrTiO[sub 3](001). Zhu, X. D.; Si, Weidong; Xi, X. X.; Jiang, Qidu // Applied Physics Letters;1/22/2001, Vol. 78 Issue 4, p460 

    Using an oblique-incidence optical reflectivity difference technique, we investigated kinetic processes in SrTiO[sub 3] homoepitaxy on SrTiO[sub 3](001) under pulsed-laser deposition conditions. Depending upon growth temperature and oxygen ambient pressure, we found that the oxidation of an...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics