TITLE

Pulsed laser deposition and characterization of epitaxial Cu/TiN/Si(100) heterostructures

AUTHOR(S)
Vispute, R.D.; Chowdhury, R.
PUB. DATE
November 1994
SOURCE
Applied Physics Letters;11/14/1994, Vol. 65 Issue 20, p2565
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the growth of epitaxial copper/titanium nitride/silicon(100) heterostructures by pulsed laser deposition technique. Structural characterization using three-axis x-ray diffraction and transmission electron microscopy; Mechanism of growth in large lattice mismatch system; Implication for advanced microelectronic devices fabrication.
ACCESSION #
4207704

 

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