TITLE

Cross-section transmission electron microscope observations of diamond-turned single-crystal Si

AUTHOR(S)
Shibata, Takayuki; Ono, Atsushi
PUB. DATE
November 1994
SOURCE
Applied Physics Letters;11/14/1994, Vol. 65 Issue 20, p2553
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the cross-section transmission electron microscope observations of diamond-turned single-crystal silicon (Si) surfaces. Conversion of Si surface layers into amorphous structure by diamond turning; Formation of microcracks through excessive dislocations accumulation; Realization of ductile-regime turning by slip system-based amorphization.
ACCESSION #
4207700

 

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