Maskless patterning of silicon surface based on scanning tunneling microscope tip-induced

Sugimura, Hiroyuki; Yamamoto, Takuma
September 1994
Applied Physics Letters;9/19/1994, Vol. 65 Issue 12, p1569
Academic Journal
Examines the fabrication of silicon micropatterns through scanning tunneling microscopy (STM). Effects of potassium hydroxide solution etching on non-anodized surfaces; Details on the height of etched pattern and thickness of the anodic oxide; Impact of humidity on the area of anodization and spatial resolution of the silicon surface.


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