Diffuse x-ray scattering from p[sup +] porous silicon by triple axis diffractometry

Koppensteiner, E.; Schuh, A.
September 1994
Applied Physics Letters;9/19/1994, Vol. 65 Issue 12, p1504
Academic Journal
Investigates the strain and microstructure of porous silicon (Si) by triple axis diffractometry. Information on the strain status and porosity of the porous Si; Correlation functions of the pores; Implication of intensity distribution measurements in diffuse x-ray scattering for crystallographic damage in the Si skeleton.


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