TITLE

Study of diffusion and trapping of a fluorinated hydrocarbon in ion beam irradiated

AUTHOR(S)
Umezawa, Kenji; Nakanishi, Shigemitu
PUB. DATE
September 1994
SOURCE
Applied Physics Letters;9/19/1994, Vol. 65 Issue 12, p1501
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines fluorinated hydrocarbon diffusion and trapping in an ion beam irradiated poly(styrene). Information on the diffusion coefficient of the trifluoromethyl aniline (TFMA); Applications of the ion beam implantation technique; Details on the TFMA trapping between two different ion beam irradiation regions.
ACCESSION #
4207652

 

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