Study of diffusion and trapping of a fluorinated hydrocarbon in ion beam irradiated

Umezawa, Kenji; Nakanishi, Shigemitu
September 1994
Applied Physics Letters;9/19/1994, Vol. 65 Issue 12, p1501
Academic Journal
Examines fluorinated hydrocarbon diffusion and trapping in an ion beam irradiated poly(styrene). Information on the diffusion coefficient of the trifluoromethyl aniline (TFMA); Applications of the ion beam implantation technique; Details on the TFMA trapping between two different ion beam irradiation regions.


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