Hydrogen desorption on various H-terminated Si(100) surfaces due to electron beam irradiation

Hsu, T.; Lin, S.
August 1992
Applied Physics Letters;8/3/1992, Vol. 61 Issue 5, p580
Academic Journal
Investigates electron-beam induced hydrogen desorption from H-terminated silicon (Si)(100) surfaces. Confirmation of H termination on Si(100) surfaces by high energy electron diffraction; Use of first-order hydrogen desorption reaction model; Differences of the hydrogen surface between (3x1) and (2x1) H-terminated Si surfaces.


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