Detection of Si--H bonds in silicon oxide by x-ray photoelectron spectrum difference

Ogawa, Hiroki; Hattori, Takeo
August 1992
Applied Physics Letters;8/3/1992, Vol. 61 Issue 5, p577
Academic Journal
Examines the silicon-hydrogen bond detection in silicon oxide by x-ray photoelectron spectrum. Evaluation of native oxide thickness in nitric acid; Evidence for desorption of hydrogen from native oxide; Effect of atomic steps on the amount of Si-H bonds.


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