TITLE

Detection of Si--H bonds in silicon oxide by x-ray photoelectron spectrum difference

AUTHOR(S)
Ogawa, Hiroki; Hattori, Takeo
PUB. DATE
August 1992
SOURCE
Applied Physics Letters;8/3/1992, Vol. 61 Issue 5, p577
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the silicon-hydrogen bond detection in silicon oxide by x-ray photoelectron spectrum. Evaluation of native oxide thickness in nitric acid; Evidence for desorption of hydrogen from native oxide; Effect of atomic steps on the amount of Si-H bonds.
ACCESSION #
4207631

 

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