TITLE

Thermal wave measurement of ion implanted semiconductors in the mirage effect geometry

AUTHOR(S)
Glazov, A.L.; Muratikov, K.L.
PUB. DATE
August 1992
SOURCE
Applied Physics Letters;8/3/1992, Vol. 61 Issue 5, p569
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Analyzes the effect of ion implant processes on thermal wave (TW) signals from semiconductors. Use of interferometric detection of a TW signal; Dependence of the signal amplitude on ion dose; Influence of pump radiation interference on TW signal.
ACCESSION #
4207628

 

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