TITLE

Loading effect of quartz microwave window on SF[sub 6] plasma in an electron cyclotron resonance

AUTHOR(S)
Watts, Andrew J.; Varhue, Walter J.
PUB. DATE
August 1992
SOURCE
Applied Physics Letters;8/3/1992, Vol. 61 Issue 5, p549
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the loading effect of quartz microwave window on SF[sub 6] plasma in an electron cyclotron resonance reactor. Effect of quartz window on silicon dioxide deposition; Reduction of plasma density by quartz window; Comparison of characterization data using a quartz window with and without an alumina cover plate.
ACCESSION #
4207621

 

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