TITLE

Fabrication of ultrathin metal oxide films using Langmuir-Blodgett deposition

AUTHOR(S)
Amm, D.T.; Johnson, D.J.
PUB. DATE
August 1992
SOURCE
Applied Physics Letters;8/3/1992, Vol. 61 Issue 5, p522
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Fabricates thin yttrium oxide (Y[sub 2]O[sub 3]) films using the Langmuir-Blodgett (LB) process. Deposition of yttrium oxide on silicon wafers; Effects of size on film microstructure; Potential application of LB deposition for fabrication of inorganic oxide film 0.1 to 40 nanometer thick.
ACCESSION #
4207612

 

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