Fabrication of ultrathin metal oxide films using Langmuir-Blodgett deposition

Amm, D.T.; Johnson, D.J.
August 1992
Applied Physics Letters;8/3/1992, Vol. 61 Issue 5, p522
Academic Journal
Fabricates thin yttrium oxide (Y[sub 2]O[sub 3]) films using the Langmuir-Blodgett (LB) process. Deposition of yttrium oxide on silicon wafers; Effects of size on film microstructure; Potential application of LB deposition for fabrication of inorganic oxide film 0.1 to 40 nanometer thick.


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