TITLE

TMGa/TEGa interactions in metalorganic molecular beam epitaxy

AUTHOR(S)
Kamp, M.; Morsch, G.
PUB. DATE
January 1995
SOURCE
Applied Physics Letters;1/16/1995, Vol. 66 Issue 3, p367
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Observes the metalorganic molecular beam epitaxy of gallium arsenide growth rates interactions between the precursors of TMgallium and TE gallium. Proposal on the elementary adsorption and desorption mechanism; Investigation on the separate and common injection of alkyls; Discussion on the species contributing to gallium arsenide growth.
ACCESSION #
4203921

 

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