TITLE

Fabrication of multilayer single-electron tunneling devices

AUTHOR(S)
Visscher, E.H.; Verbrugh, S.M.
PUB. DATE
January 1995
SOURCE
Applied Physics Letters;1/16/1995, Vol. 66 Issue 3, p305
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a developed multilayer fabrication process for single-electron tunneling (SET) devices. Use of shadow evaporation technique in one single lithographic step; Characteristics of the fabricated SET transistors; Manifestation on the fabrication of tunnel junctions; Potentiality of integrating SET devices.
ACCESSION #
4203900

 

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