Fabrication of multilayer single-electron tunneling devices

Visscher, E.H.; Verbrugh, S.M.
January 1995
Applied Physics Letters;1/16/1995, Vol. 66 Issue 3, p305
Academic Journal
Presents a developed multilayer fabrication process for single-electron tunneling (SET) devices. Use of shadow evaporation technique in one single lithographic step; Characteristics of the fabricated SET transistors; Manifestation on the fabrication of tunnel junctions; Potentiality of integrating SET devices.


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