TITLE

Room temperature electron cyclotron resonance chemical vapor deposition of high quality TiN

AUTHOR(S)
Boumerzoug, Mohamed; Zhengda Pang
PUB. DATE
January 1995
SOURCE
Applied Physics Letters;1/16/1995, Vol. 66 Issue 3, p302
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports the deposition of gold colored titanium nitride (TiN) films through decomposing titanium chlorine in downstreams of nitride hydrogen electron cyclotron resonance plasma. Investigation on the morphology of deposited films; Significance of Auger electron spectroscopy; Deposition temperature of TiN.
ACCESSION #
4203898

 

Related Articles

  • Deposition of high-quality TiN using tetra-isopropoxide titanium in an electron cyclotron.... Weber, A.; Poeckelmann, R. // Applied Physics Letters;11/13/1995, Vol. 67 Issue 20, p2934 

    Examines the deposition of high-quality TiN films in an electron cyclotron resonance (ECR) plasma process using tetra-isopropoxide titanium (TIPT) as precursor. Introduction of TIPT into an ECR nitrogen; Use of an oxygen containing titanium precursor; Characterization of TiN films using...

  • Structural, optical, and electronic properties of cubic TiNx compounds. Kang, Ji Hoon; Kim, Kwang Joo // Journal of Applied Physics;7/1/1999, Vol. 86 Issue 1, p346 

    Studies the structural, optical and electronic properties of cubic Titanium nitrides (TiNx). Physical properties of TiNx; Details on the experiment; Results.

  • Spatial distributions of electron temperature and density in electron cyclotron resonance... Cronrath, W.; Bowden, M.D. // Journal of Applied Physics;3/1/1997, Vol. 81 Issue 5, p2105 

    Examines the spatial distributions of electron temperature and density in electron cyclotron resonance discharges. Locations of the electron cyclotron resonance zones; Simulation results from a hybrid code; Large difference of radial electron density profiles.

  • Monte Carlo simulations of argon ion transport in the downstream region of electron cyclotron... Zhong, X.X.; Wu, J.D.; Wu, C.Z.; Li, F.M. // Journal of Applied Physics;5/15/1998, Vol. 83 Issue 10, p5069 

    Provides information on the description of the ion dynamics in the downstream region of electron cyclotron resonance (ECR) argon plasma with the gas pressure ranging from 0.01 Pa to 0.1 Pa. Indepth look at the Monte Carlo method; Detailed information on the assumptions and governing equations;...

  • Characterization of reactively evaporated TiN layers for diffusion barrier applications. Gagnon, G.; Currie, J. F.; Béïque, G.; Brebner, J. L.; Gujrathi, S. C.; Ouellet, L. // Journal of Applied Physics;2/1/1994, Vol. 75 Issue 3, p1565 

    Presents a study which characterized reactively evaporated titanium nitride layers for diffusion barrier applications in silicon devices. Experimental details; Results; Discussion.

  • Measurement of lower-hybrid-driven current profile by Abel inversion of electron-cyclotron wave transmission spectra. Fidone, I.; Giruzzi, G.; Caron, X.; Meyer, R. L. // Physics of Fluids B: Plasma Physics;Oct91, Vol. 3 Issue 10, p2719 

    A method for measuring the radial profile of the lower-hybrid-driven current in a low-density tokamak plasma using electron-cyclotron wave attenuation is discussed. This diagnostic scheme is reminiscent of the transmission interferometry approach, commonly used in tokamaks to measure the plasma...

  • He-plasma assisted epitaxy for highly resistive, optically fast InP-based materials. Mitchell, D. B.; Robinson, B. J.; Thompson, D. A.; Qian, Li; Benjamin, S. D.; Smith, P.W. E. // Applied Physics Letters;7/22/1996, Vol. 69 Issue 4, p509 

    InP and related quaternaries (InGaAsP) have been grown by conventional gas source molecular beam epitaxy while simultaneously exposing the growth surface to a He plasma stream generated by electron cyclotron resonance. For growth temperatures from 400 to 450 °C, the InP produced by this...

  • Damage induced by exposing AlGaAs layers to electron cyclotron resonance SF[sub 6]/CHF[sub 3].... Mitani, Katsuhiko; Oda, Hiroto // Applied Physics Letters;8/29/1994, Vol. 65 Issue 9, p1165 

    Examines the damage induced by exposing Al[sub x]Ga[sub 1-x]As and GaAs crystals to electron cyclotron resonance. Measurement of the sheet resistance of the samples; Restoration of the damage by annealing; Effect of annealing on plasma-exposed Al[sub x]Ga[sub 1-x]As; Composition of the GaAs...

  • Wave-induced chaotic radial transport of energetic electrons in a laboratory terrella experiment. Warren, H.P.; Mauel, M.E. // Physics of Plasmas;Nov95, Vol. 2 Issue 11, p4185 

    Reports the observation of wave-induced chaotic radial transport of energetic electrons in the Collisionless Terrella Experiment. Creation of a localized population of energetic electrons using electron cyclotron resonance heating; Increases in the flux of energetic particles to the detector.

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics