Room temperature electron cyclotron resonance chemical vapor deposition of high quality TiN

Boumerzoug, Mohamed; Zhengda Pang
January 1995
Applied Physics Letters;1/16/1995, Vol. 66 Issue 3, p302
Academic Journal
Reports the deposition of gold colored titanium nitride (TiN) films through decomposing titanium chlorine in downstreams of nitride hydrogen electron cyclotron resonance plasma. Investigation on the morphology of deposited films; Significance of Auger electron spectroscopy; Deposition temperature of TiN.


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