The role of the substrate in photoenhanced metalorganic chemical vapor deposition

Maayan, E.; Kreinin, O.
January 1995
Applied Physics Letters;1/16/1995, Vol. 66 Issue 3, p296
Academic Journal
Demonstrates selective gallium arsenide photoenhanced metalorganic chemical vapor deposition (PE-MOCVD) growth on gallium arsenide (GaAs) laser diode irradiation. Role of substrates on PE-MOCVD growth of GaAs; Normalization of photoenhanced growth rate; Indication of kinetic model consistency in the experimental data.


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