Submicron, soft x-ray fluorescence imaging

La Fontaine, Bruno; MacDowell, Alastair A.
January 1995
Applied Physics Letters;1/16/1995, Vol. 66 Issue 3, p282
Academic Journal
Reports the realization of submicron spatial resolution using single-crystal phosphors excited with ultraviolet. Characteristics of phosphor for imaging purposes; Comparison with terbium-activated yttrium orthosilicate fluorescent crystal; Visualization of applications and aerial images characterization produced by lithographic exposure tools.


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