TITLE

Wet oxidation of AlAs grown by molecular beam epitaxy

AUTHOR(S)
Yong-Soo Lee; Yong-Hyun Lee
PUB. DATE
November 1994
SOURCE
Applied Physics Letters;11/21/1994, Vol. 65 Issue 21, p2717
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the oxidation of aluminum arsenide (AlAs) grown by molecular beam epitaxy. Relation between the defect-free oxidation of AlAs and oxidation temperature; Magnitude of the oxidation temperature; Application of scanning electron microscopy; Estimation of the fixed charge density.
ACCESSION #
4203870

 

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