TITLE

Synthesis of epitaxial Pt on (100)Si using TiN buffer layer by pulsed laser deposition

AUTHOR(S)
Tiwari, P.; Wu, X.D.
PUB. DATE
November 1994
SOURCE
Applied Physics Letters;11/21/1994, Vol. 65 Issue 21, p2693
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the synthesis of epitaxial platinum films on (100)silicon using titanium nitride buffer layer. Application of pulsed laser deposition; Percentage of ion beam channeling; Properties of the multilayer structure.
ACCESSION #
4203862

 

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