Hard boron oxide thin-film deposition using electron cyclotron resonance microwave plasmas

Gorbatkin, S.M.; Rhoades, R.L.
November 1994
Applied Physics Letters;11/21/1994, Vol. 65 Issue 21, p2672
Academic Journal
Investigates the deposition of hard boron oxide thin films by electron resonance microwave plasmas. Magnitude of the effusion cell; Estimation of boron and argon ion bombardment; Mechanisms involved in the ion boron flux.


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