TITLE

Direct measurements of lattice parameter variations and relaxation kinetics in strained

AUTHOR(S)
Sardela Jr., M.R.; Hansson, G.V.
PUB. DATE
September 1994
SOURCE
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1442
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents direct measurements of anneal-induced variations of the in-plane and normal components of the lattice parameter of strained silicon- germanium/Si heterostructures. Technique used in allowing determination of strain levels; Observation of furnace annealing in argon ambient; Use of two-bounce germanium analyzer crystal in the reciprocal space mapping.
ACCESSION #
4203830

 

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