Nanometer-structure writing on Si(100) surfaces using a non-contact-mode atomic force microscope

Dawen Wang; Liming Tsau
September 1994
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1415
Academic Journal
Examines nanometer structures written on silicon(100) surfaces using a non-contact-mode atomic force microscope (AFM). Formation of silicon oxide; Determination of the writing resolution by local chemical reactions; Discussion of the oscillation amplitude of the cantilever during AFM operation.


Related Articles

  • Nanotube nanotweezers. Lerner, Eric // Industrial Physicist;Apr2000, Vol. 6 Issue 2, p14 

    Reports the development of tweezers for the manipulation of nano-objects. Use of the atomic force microscopes in pushing atoms on a plane; Capabilities of the nanotweezers; Applications of the nanotube nanotweezers.

  • Nanostructure patterns written in III-V semiconductors by an atomic force microscope. Magno, R.; Bennett, B.R. // Applied Physics Letters;4/7/1997, Vol. 70 Issue 14, p1855 

    Uses an atomic force microscope to pattern nanometer-scale features in III-V semiconductors by cutting through a thin surface layer of a different semiconductor. Formation of cuts up to 10 nanometer deep; Development of lines as narrow as 20 and 2 nanometer deep; Transfer of patterns into an...

  • Nanopatterning of Si/SiGe electrical devices by atomic force microscopy oxidation. Bo, Xiang-Zheng; Rokhinson, Leonid P.; Yin, Haizhou; Tsui, D. C.; Sturm, J. C. // Applied Physics Letters;10/21/2002, Vol. 81 Issue 17, p3263 

    Two nanopatterning methods for silicon/silicon-germanium (Si/SiGe) heterostructures are demonstrated: (1) direct atomic force microscopy (AFM) oxidation on SiGe layers and (2) AFM oxidation on silicon followed by selective wet etching of SiGe. When directly oxidizing SiGe alloys, minimum...

  • Detergent approach to nanomachines. Davey, Tim // Australasian Science;Oct2000, Vol. 21 Issue 9, p38 

    Discusses the role of shampoos and conditioners in the development of nanomachines. Features of an Atomic Force Microscope; How to affix nanomachines to a surface; Components of detergents.

  • Covalently functionalized nanotubes as nanometre-sized probes in chemistry and biology. Wong, Stanislaus S.; Joselevich, Ernesto; Woolley, Adam T.; Cheung, Chin Li; Lieber, Charles M. // Nature;7/2/1998, Vol. 394 Issue 6688, p52 

    Presents research which demonstrated that nanotube tips with the capability of chemical and biological discrimination can be created with acidic functionality. Use of carbon nanotubes as probe tips in atomic force microscopy (AFM); Benefits of carbon nanotubes; Experiments with modified...

  • AFM detection of the mechanical resonances of coiled carbon nanotubes. Volodin, A.; Van Haesendonck, C.; Tarkiainen, R.; Ahlskog, M.; Fonseca, A.; Nagy, J.B. // Applied Physics A: Materials Science & Processing;2001, Vol. 72 Issue 7, pS75 

    Abstract. We introduce a method for atomic force microscopy (AFM)-based detection of mechanical resonances in helix-shaped multi-walled carbon nanotubes. After deposition on an oxidized silicon substrate, the three-dimensional structure of suspended nanotubes, which bridges an artificially...

  • Pulsed-laser assisted nanopatterning of metallic layers combined with atomic force microscopy. Huang, S. M.; Hong, M. H.; Lu, Y. F.; Luky`anchuk, B. S.; Song, W. D.; Chong, T. C. // Journal of Applied Physics;3/1/2002, Vol. 91 Issue 5, p3268 

    Pulsed-laser assisted nanopatterning of metallic layers on silicon substrates under an atomic force microscope (AFM) tip has been investigated. A 532 nm Nd:YAG pulsed laser with a pulse duration of 7 ns was used. Boron doped silicon tips were used in contact mode. This technique enables...

  • Growth front roughening of room-temperature deposited copper nanocluster films. Palasantzas, G.; Koch, S. A.; De Hosson, J. Th. M. // Applied Physics Letters;8/5/2002, Vol. 81 Issue 6, p1089 

    Growth front aspects of copper nanocluster films deposited with low energy onto silicon substrates at room temperature are investigated by atomic force microscopy. Analyses of the height-difference correlation function yield a roughness exponent H of 0.45 ± 0.05. The root-mean-sqaure...

  • Combined scanning electrochemical atomic force microscopy for tapping mode imaging. Kueng, A.; Kranz, C.; Mizaikoff, B.; Lugstein, A.; Bertagnolli, E. // Applied Physics Letters;3/10/2003, Vol. 82 Issue 10, p1592 

    With the integration of submicro- and nano-electrodes into atomic force microscopy (AFM) tips using microfabrication techniques, an elegant approach combining scanning electrochemical microscopy (SECM) with atomic force microscopy has recently been demonstrated. Simultaneous imaging of...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics