TITLE

Nanometer-structure writing on Si(100) surfaces using a non-contact-mode atomic force microscope

AUTHOR(S)
Dawen Wang; Liming Tsau
PUB. DATE
September 1994
SOURCE
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1415
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines nanometer structures written on silicon(100) surfaces using a non-contact-mode atomic force microscope (AFM). Formation of silicon oxide; Determination of the writing resolution by local chemical reactions; Discussion of the oscillation amplitude of the cantilever during AFM operation.
ACCESSION #
4203821

 

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