Heavily boron-doped silicon membranes with enhanced mechanical properties for x-ray mask substrate

Ho-Jun Lee; Chul-Hi Han
September 1994
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1385
Academic Journal
Demonstrates the fabrication of heavily boron-doped silicon membranes showing improvement in mechanical properties for x-ray mask substrate. Elimination of the misfit dislocation from the membrane; Measurement of surface roughness of the membrane; Extraction of the lattice constant of strain-free membrane.


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