TITLE

Heavily boron-doped silicon membranes with enhanced mechanical properties for x-ray mask substrate

AUTHOR(S)
Ho-Jun Lee; Chul-Hi Han
PUB. DATE
September 1994
SOURCE
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1385
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates the fabrication of heavily boron-doped silicon membranes showing improvement in mechanical properties for x-ray mask substrate. Elimination of the misfit dislocation from the membrane; Measurement of surface roughness of the membrane; Extraction of the lattice constant of strain-free membrane.
ACCESSION #
4203809

 

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