Interfacial microstructures of ultrathin Ge layers on Si probed by x-ray scattering and

Ming, Z.H.; Soo, Y.L.
September 1994
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1382
Academic Journal
Examines interfacial microstructures of ultrathin germanium (Ge) layers on silicon using x-ray scattering and fluorescence yield. Information on microstructures in terms of the average interfacial roughness; Determination of structural parameters by comparing experimental data with theoretical models; Changes of microstructures in Ge epilayer.


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