Mechanical strength of Czochralski silicon crystals with carbon concentrations from 10[sup 14]

Fukuda, Tetsuo
September 1994
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1376
Academic Journal
Examines the influence of oxygen precipitates on the mechanical strength of Czochralski silicon crystals. Composition of Czochralski silicon crystals; Dependence of precipitated oxygen on carbon concentration; Use of transmission electron microscope in examining the morphology of oxygen precipitates after precipitation annealing.


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