TITLE

Metalorganic chemical vapor deposition technique for growing c-axis oriented ZnO thin films in

AUTHOR(S)
Kumar, N. Deepak; Kamalasanan, M.N.
PUB. DATE
September 1994
SOURCE
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1373
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the growth of zinc oxide (ZnO) thin films in atmospheric pressure air using 2-ethyl hexanoate by metalorganic chemical vapor deposition technique. Growth of films on glass above 350 degrees Celsius showing c-axis orientation; Materials used to make ZnO films; Observation of the presence of carbon as an impurity.
ACCESSION #
4203805

 

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