Deposition of fluoropolymer thin films by vacuum-ultraviolet laser ablation

Ueno, Y.; Fujii, T.
September 1994
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1370
Academic Journal
Demonstrates deposition of polytetrafluoroethylene thin films by laser ablation using fluoride laser. Composition of the deposited films using x-ray photoemission spectra; Surface morphology of films deposited at room temperature; Significance of in-plume reactions for laser ablation deposition method.


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