TITLE

Deposition of fluoropolymer thin films by vacuum-ultraviolet laser ablation

AUTHOR(S)
Ueno, Y.; Fujii, T.
PUB. DATE
September 1994
SOURCE
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1370
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates deposition of polytetrafluoroethylene thin films by laser ablation using fluoride laser. Composition of the deposited films using x-ray photoemission spectra; Surface morphology of films deposited at room temperature; Significance of in-plume reactions for laser ablation deposition method.
ACCESSION #
4203804

 

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