Photocurrent multiplication in hydrogenated amorphous silicon p-i-n photodiode films

Sawada, Kazuaki; Mochizuki, Chichiro
September 1994
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1364
Academic Journal
Observes the photocurrent multiplication of hydrogenated amorphous silicon p-i-n photodiodes. Fabrication of photodiodes on a heavily doped n-type silicon substrate; Function of amorphous silicon films in various electronic fields; Impact of using plasma enhanced chemical vapor deposition system on the breakdown field of the photodiodes.


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