TITLE

Fast two-dimensional self-consistent kinetic modeling of low-pressure inductively coupled RF

AUTHOR(S)
Kortshagen, U.; Tsendin, L.D.
PUB. DATE
September 1994
SOURCE
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1355
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a two-dimensional self-consistent model for an inductively coupled radio frequency (RF) plasma. Determination of the electron distribution function through solution of a kinetic equation in the nonlocal approach; Computation of the static space charge potential; Calculation of the RF electric field profile from the wave equation.
ACCESSION #
4203799

 

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