Fast two-dimensional self-consistent kinetic modeling of low-pressure inductively coupled RF

Kortshagen, U.; Tsendin, L.D.
September 1994
Applied Physics Letters;9/12/1994, Vol. 65 Issue 11, p1355
Academic Journal
Presents a two-dimensional self-consistent model for an inductively coupled radio frequency (RF) plasma. Determination of the electron distribution function through solution of a kinetic equation in the nonlocal approach; Computation of the static space charge potential; Calculation of the RF electric field profile from the wave equation.


Related Articles

  • On the efficiency of the electron sheath heating in capacitively coupled radio frequency.... Buddemeier, U.; Kortshagen, U. // Applied Physics Letters;7/10/1995, Vol. 67 Issue 2, p191 

    Investigates the efficiency of electron sheath heating in capacitively coupled radio frequency discharges. Observation on the electron distribution functions (EDF); Dependence of sheath heating efficiency on the magnitude of sheath potentials; Types of EDF.

  • Measurements of electron energy distribution function in an asymmetric radio-frequency discharge plasma. Okuno, Yoshihiro; Ohtsu, Yasunori; Komatsu, Chihiro; Fujita, Hiroharu // Journal of Applied Physics;2/15/1993, Vol. 73 Issue 4, p1612 

    Presents a study which measured the electron energy distribution functions (EEDF) in an assymetric radio-frequency discharge helium plasma. Usefulness of the parallel inductance-capacitance; Method used to determine the EEDF; Concentration of electrons with high energy.

  • Collisionless electron heating by radio-frequency plasma sheaths. Surendra, M.; Vender, D. // Applied Physics Letters;7/11/1994, Vol. 65 Issue 2, p153 

    Investigates the collisionless radio frequency sheaths in a self-consistent particle simulation. Restriction of radio frequency driven electrode to one-dimensional simulation; Examination of the sheath in isolation from other discharge processes; Distortion of the electron velocity...

  • Electron-energy distribution function measurements in capacitively coupled rf discharges. Dilecce, G.; Capitelli, M.; De Benedictis, S. // Journal of Applied Physics;1/1/1991, Vol. 69 Issue 1, p121 

    Presents electron-energy distribution function measurements in capacitively coupled radio frequency (rf) discharges. Preparation of the electrostatic probe technique for the assessment of the reliability of measurements; Description of the non-Maxwellian character of the electron energy...

  • rf-probe method for measurements of electron densities in plasmas at high neutral densities. Johnsen, Rainer // Review of Scientific Instruments;Mar86, Vol. 57 Issue 3, p428 

    A radio frequency (rf) method has been developed for measurements of the electron density in weakly ionized gases at high (∼atmospheric) neutral density, The technique relies on passing an rf current (f = 15 MHz) between two concentric cylindrical electrodes and relating the measured...

  • Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge. Godyak, V.A.; Piejak, R.B. // Applied Physics Letters;12/6/1993, Vol. 63 Issue 23, p3137 

    Examines the electron energy distribution function in a low pressure radio frequency (rf) discharge in argon. Correlation of electron temperature with plasma heating rf field; Impact of the combined effect of nonlocal electron kinetics and a non-Maxwellian electron energy distribution function.

  • High-energy electron-free plasma source. Yabe, Eiji; Takahashi, Kenjie // Applied Physics Letters;8/8/1994, Vol. 65 Issue 6, p694 

    Examines the development of radio-frequency plasma source with magnetic ring-cusp field. Determination of electron energy distribution function and electron density; Use of an asymmetrical double probe; Exclusion of high-energy electrons; Comparison of the electron density for helium to the...

  • Electron density fluctuations in a dusty Ar/SiH4 rf discharge. Stoffels, W. W.; Stoffels, E.; Kroesen, G. M. W.; de Hoog, F. J. // Journal of Applied Physics;10/15/1995, Vol. 78 Issue 8, p4867 

    Details a study which investigated the average electron density and electron density fluctuations in a dusty argon/SiH[sub4] radio frequency discharge. Experimental procedures; Pressure dependence of electron density; Time evolution of electron density after the plasma has been switched on.

  • Electron cyclotron resonance heating in tandem-mirror end cells. Rognlien, T. D.; Matsuda, Y.; Stallard, B. W.; Stewart, J. J. // Physics of Fluids B: Plasma Physics;Feb90, Vol. 2 Issue 2, p338 

    A relativistic Fokker–Planck code is used to study the formation of non-Maxwellian electron velocity distributions in the end cell of a tandem mirror from the combined effects of Coulomb collisions and electron cyclotron radio-frequency (rf) heating. Axial electrostatic potential profiles...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics