TITLE

Inversion from selective homoepitaxy of Si to selective Si film deposition on SiO[sub 2] using

AUTHOR(S)
Matsuura, Takashi; Ohmi, Tadahiro
PUB. DATE
December 1992
SOURCE
Applied Physics Letters;12/14/1992, Vol. 61 Issue 24, p2908
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines plasma enhanced selective silicon (Si) film deposition using an ultraclean electron cyclotron resonance plasma. Achievement of Si selective homoepitaxy without substrate heating; Requirements for inversion of selectivity to deposit Si films; Analysis of growth with or without ion bombardment.
ACCESSION #
4203778

 

Related Articles

  • The CEA/Saclay 2.45 GHz Microwave Ion Source for H- Ion Production. Gobin, R.; Benmeziane, K.; Delferrière, O.; Ferdinand, R.; Harrault, F.; Sherman, J. D. // AIP Conference Proceedings;2002, Vol. 639 Issue 1, p177 

    H[sup -] ions have now been observed in currents extracted from the CEA/Saclay ECR proton source. A pulsed, 90 degree dipole magnet has been installed 14.8 cm downstream from an ion beam extraction system designed to operate up to 10 kV. The plasma chamber Can be biased by a negative or positive...

  • Effect of a metal-dielectric structure introduced in the plasma chamber of the Frankfurt 14 GHz electron cyclotron resonance ion source Schachter, L.; Stiebing, K. E.; Stiebing, K.E.; Dobrescu, S.; Badescu-Singureanu, AI. I.; Badescu-Singureanu, Al. I.; Schmidt, L.; Hohn, O.; Runkel, S. // Review of Scientific Instruments;Feb1999, Vol. 70 Issue 2, p1367 

    Presents an approach to significantly increase the high charge state ion beams delivered by electron cyclotron resonance ion sources by using metal-dielectric structures characterized by high secondary electron emission properties. Argon beam intensities and charge-state distributions obtained;...

  • High intensity metal ion beam production with ECR ion sources at the Lawrence Berkeley National Laboratory. Wutte, D.; Abbott, S.; Leitner, M. A.; Lyneis, C. M. // Review of Scientific Instruments;Feb2002, Vol. 73 Issue 2, p521 

    The large number of different experiments performed at the 88 Inch Cyclotron requires great variety and flexibility in the production of ion beams. This flexibility is provided by the two high performance electron cyclotron resonance (ECR) ion sources, the LBL ECR and the AECR-U, which can...

  • Low-temperature surface cleaning method using low-energy reactive ionized species. Yamada, Hiroshi // Journal of Applied Physics;1/15/1989, Vol. 65 Issue 2, p775 

    Presents a study which described a low-temperature silicon substrate surface cleaning method using a low-energy controlled ionized species produced from H[sub2] or H[sub2-]SiH[sub4] electron-cyclotron-resonance (ECR) plasma. Examples of cleaning procedures; Description of the reactive ion beam...

  • Highly charged ECR ion sources: Summary and comments (invited). Geller, R. // Review of Scientific Instruments;Jan1990, Vol. 61 Issue 1, p659 

    A review is presented of the historical evolution of the ECR ion source and its application for the production of very highly charged ions. The status of our present understanding of the scaling laws for ion charge state and ion beam current as a function of ion mass, magnetic field strength,...

  • Conception and performance of the new Lagrippa facility. Lamy, Th.; Lamboley, G.; Hitz, D.; Andrä, H. J. // Review of Scientific Instruments;Jan1990, Vol. 61 Issue 1, p336 

    A new Lagrippa facility has been constructed for the production of high quality beams of multicharged ions with energies of 1-25 q keV. The machine is based on the new 10 GHz, Caprice ECR-ion source which operates partially on the second harmonic. A new extraction optics for ECR sources with...

  • Efficiency and transient time studies of an electron cyclotron resonance ion source for radioactive ion beam production at ISAC/TRIUMF. Jayamanna, K.; Yuan, D.; Bishop, D.; Dale, D.; Dombsky, M.; Kuo, T.; Kadantsev, S.; Keitel, R.; Louie, D.; McDonald, M.; Olivo, M.; Schmor, P.; Stuber, E. // Review of Scientific Instruments;Feb2000, Vol. 71 Issue 2, p946 

    Focuses on development of an electron cyclotron resonance ion source with a single mode resonator. Production of high efficient single charged ion beams from exiguous gaseous elements; Formation of short and long half-life radioactive ion beams; Description of the effect of the transfer tube...

  • Beam extraction from a compact Ku-band electron cyclotron resonance ion source with double resonance modes. Tojyo, E.; Oyaizu, M.; Jeong, S. C.; Ishiyama, H.; Ishida, Y.; Kawakami, H.; Miyatake, H.; Katayama, I.; Nomura, T. // Review of Scientific Instruments;Feb2000, Vol. 71 Issue 2, p1110 

    Examines results of beam extraction tests carried out using a compact Ku-band electron cyclotron resonance ion source. Structure of the test source; Beam extraction with the double frequency resonance.

  • Design of an advanced minimum B for electron cyclotron resonance multicharged ion sources. Ishii, S.; Kato, Y. // Review of Scientific Instruments;May93, Vol. 64 Issue 5, p1131 

    An advanced configuration of minimum-B field is designed for the electron cyclotron resonance (ECR) multicharged ion sources. The aim is to dramatically increase the efficiency of ion beam extraction by correcting the deformed magnetic flux tube containing hot plasma. The correction is performed...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics