Tera-hertz GaAs metal-semiconductor-metal photodetectors with 25 nm finger spacing and finger width

Chou, S.Y.; Liu, Y.
July 1992
Applied Physics Letters;7/27/1992, Vol. 61 Issue 4, p477
Academic Journal
Presents the fabrication of metal-semiconductor-metal photodetectors. Application of the high-resolution electron beam lithography; Details of the direct current measurements; Achievement of the subpicosecond response time.


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