TITLE

Electromigration-induced failure in passivated aluminum-based metallizations--The dependence on

AUTHOR(S)
Li, C.-Y.; Borgesen, P.
PUB. DATE
July 1992
SOURCE
Applied Physics Letters;7/27/1992, Vol. 61 Issue 4, p411
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the factors influencing the electromigration-induced failure in passivated aluminum-based metallizations. Variation of lifetimes with temperature and current density; Migration and coalescence of voids; Determinants of temperature dependence.
ACCESSION #
4189767

 

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