Intrinsic resputtering in pulsed-laser deposition of lead-zirconate-titanate thin films

Hau, S.K.; Wong, K.H.
January 1995
Applied Physics Letters;1/9/1995, Vol. 66 Issue 2, p245
Academic Journal
Investigates the pulsed laser deposition (PLD) of lead-zirconate-titanate thin films under low ambient pressure. Study on the angular deposition distributions of the elements of the films; Occurrence of a dip near the target surface normal of the deposition profile of lead; Importance of intrinsic resputtering in the PLD process.


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