Antiferroelectric PbZrO[sub 3] thin films prepared by multi-ion-beam sputtering

Kanno, Isaku; Hayashi, Shigenori
January 1995
Applied Physics Letters;1/9/1995, Vol. 66 Issue 2, p145
Academic Journal
Investigates the fabrication of antiferroelectric PbZrO[sub 3] thin films. Use of multi-ion-beam sputtering technique at a substrate temperature; Determination of the high dielectric constants of the thin films; Demonstration of the antiferroelectric to ferroelectric phase transition of the films.


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