TITLE

Epitaxial LiTaO[sub 3] thin film by pulsed metalorganic chemical vapor deposition from a single

AUTHOR(S)
Huyang Xie; Raj, Rishi
PUB. DATE
December 1993
SOURCE
Applied Physics Letters;12/6/1993, Vol. 63 Issue 23, p3146
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the growth of lithium tantalate thin film on sapphire from a single metalorganic precursor in chemical vapor deposition. Result of x-ray diffraction analysis; Orientation of the thin films in relation to the sapphire surface; Influence of growth temperature on epitaxy.
ACCESSION #
4177623

 

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