TITLE

Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge

AUTHOR(S)
Godyak, V.A.; Piejak, R.B.
PUB. DATE
December 1993
SOURCE
Applied Physics Letters;12/6/1993, Vol. 63 Issue 23, p3137
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the electron energy distribution function in a low pressure radio frequency (rf) discharge in argon. Correlation of electron temperature with plasma heating rf field; Impact of the combined effect of nonlocal electron kinetics and a non-Maxwellian electron energy distribution function.
ACCESSION #
4177620

 

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