TITLE

Surfactants in Si(111) homoepitaxy

AUTHOR(S)
Hoegen, M. Horn-von; Falta, J.
PUB. DATE
January 1995
SOURCE
Applied Physics Letters;1/23/1995, Vol. 66 Issue 4, p487
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the crystalline quality of surfactant mediated grown homoepitaxial silicon (Si) films on Si. Dependence of site exchange between Si and adsorbate on binding energy; Effects of bound adsorbate on growth inhibition; Formation of bulk defects in the film during Si growth.
ACCESSION #
4177069

 

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