TITLE

Anti-phase direct bonding and its application to the fabrication of InP-based 1.55 mum

AUTHOR(S)
Okuno, Y.; Uomi, K.
PUB. DATE
January 1995
SOURCE
Applied Physics Letters;1/23/1995, Vol. 66 Issue 4, p451
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the application of anti-phase direct bonding to the fabrication of wavelength lasers on GaAs substrates. Bond of InP and GaAs wafers at the atomic level; Equivalence in performance between lasers in anti-phase direct bonding and in-phase direct bonding; Importance of anti-phase direct bonding to integrate various devices.
ACCESSION #
4177057

 

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