TITLE

Exact solutions of balance equation governing ion-beam-induced composition changes and sputtering

AUTHOR(S)
Sigmund, Peter
PUB. DATE
January 1995
SOURCE
Applied Physics Letters;1/23/1995, Vol. 66 Issue 4, p433
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines analytic solutions of balance equations governing ion-beam-induced composition changes. Use of numerical codes in testing analytic solutions; Consideration of sputtering to unify thermal process; Application of simple adopted expression on arrive analytic solutions.
ACCESSION #
4177051

 

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