Optical beam deflection imaging of the electron beam interaction volume in semiconductors

Chang, G.Y.; Givens, R.B.
August 1993
Applied Physics Letters;8/2/1993, Vol. 63 Issue 5, p645
Academic Journal
Examines the optical beam deflection (OBD) method in imaging the electron beam interaction volume in semiconductors. Use of laser source OBD in monitoring electron thermalization rates in a one-dimensional geometry; Influence of modulation frequency on carrier and thermal diffusion; Role of fast secondary electron in determining the beam lithography resolution.


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