Electronic passivation of n- and p-type GaAs using chemical vapor deposited GaS

Tabib-Azar, Massood; Soon Kang
August 1993
Applied Physics Letters;8/2/1993, Vol. 63 Issue 5, p625
Academic Journal
Examines the use of chemical vapor deposited gallium sulfide for the electronic passivation of various gallium arsenides. Information on gallium arsenide; Involvement of de-ionized water in laser enhanced cleaning of the surface; Use of photoluminescence intensity in evaluating electronic passivation.


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